They have the same stats like any vanilla High tech industry. So they are tier 3. Not sure how your industry looks like. But tier 3 industry buildings have quite a few requirements.

I'm having trouble making the eco industry buildings work in industry zones. They won't grow automatically I have to manually place them even though I have them set up in the theme manager. When I do place them it says they need more services but I have every service I can think of near them Garbage, Firehouse, Police, ETC. Maybe there's something I'm missing.

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